Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Patent
1993-01-08
1995-01-17
Bennett, Henry A.
Drying and gas or vapor contact with solids
Process
Gas or vapor pressure is subatmospheric
34586, 4272481, 427250, 118715, F26B 308
Patent
active
053816056
ABSTRACT:
Method and apparatus for generating and delivering a gas that contains vapor produced by subliming a solid for use in chemical vapor deposition processes such as Metal Organic Molecular Beam Epitaxy (MOMBE) and Organometallic Vapor Phase Epitaxy (OMVPE). The method includes generating a gas saturated with the vapor and subsequently diluting the gas with an inert gas to obtain an uniform non-saturated gas. The apparatus includes a vessel for containing a sublimable solid, a heater for maintaining the vessel at a desired temperature, tubes and valves for introducing a gas into the vessel and for discharging a gas that is saturated with the vapor of the solid from the vessel, and a tube and a valve for diluting a gas discharged from the vessel.
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Bennett Henry A.
Photonics Research Incorporated
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