Method of manufacturing semiconductor device having straight wal

Fishing – trapping – and vermin destroying

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437190, H01L 21441

Patent

active

054361982

ABSTRACT:
A remaining layer obtained by etching away a half of a resist layer along its depth direction which functions as a mask when a straight wall type bump is formed, is employed as a protection layer for a semiconductor element, so that the surface protection of the semiconductor element can be simply achieved.

REFERENCES:
patent: 5244833 (1993-09-01), Gensauge et al.
patent: 5270253 (1993-12-01), Arai et al.

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