Ion source gaseous discharge initiation impulse valve

Radiant energy – Ion generation – Field ionization type

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250430, H01J 3700

Patent

active

054382050

ABSTRACT:
An impulse valve for an ion source is positioned between an ion source chamber and a gas metering valve. The impulse valve is a two-position solenoid-controlled valve which is closed in its off position. In the off-position, the valve forms a reservoir between the valve stem of the impulse valve and the metering orifice of the metering valve. In the off condition, the gas reservoir fills with gas that over time equilibrates to the pressure of the gas supplied to the metering valve. The volume of the gas reservoir and the pressure of the gas which is supplied to the metering valve are chosen so that when the two-position valve is open, the gas contained in the reservoir is sufficient to pressurize the ion source chamber to a pressure of approximately 0.1 Torr. Thus, when the impulse valve opens, a pulse of gas flows into the ion source chamber, where a plasma discharge is initiated. As ions and gas flow through the ion discharge port, the pressure in the ion chamber drops until it reaches an equilibrium pressure with the supply of gas through the metering valve. This pressure is typically one-tenth of the initiation pressure, or 0.01 Torr. The impulse valve also serves to provide a fail-safe shut-down mechanism, so that when power is lost, the valve returns to its closed condition.

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patent: 5237175 (1993-08-01), Wells

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