Wafer transport system

Details Wafer transport system Wafer transport system

1975-05-23

1977-06-21

Blix, Trygve M.

Coating apparatus

With means to apply electrical and/or radiant energy to work...

With electromagnetic and/or electrostatic removal of...

118 501, 198339, C23C 1308

Patent

active

040306224

ABSTRACT:
An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.

REFERENCES:
patent: 3260383 (1966-07-01), Fitzgerald
patent: 3645581 (1972-02-01), Lasch et al.
patent: 3656454 (1972-04-01), Schrader
patent: 3786912 (1974-01-01), Taylor
patent: 3833018 (1974-09-01), Brooks
patent: 3901183 (1975-08-01), Wittkower

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