Method of manufacturing cantilever drive mechanism, method of ma

Details Method of manufacturing cantilever drive mechanism, method of ma Method of manufacturing cantilever drive mechanism, method of ma

1994-05-10

1995-03-14

Dzierzynski, Paul M.

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Electrical modification or sensing of storage medium

H01J 3700

Patent

active

053982290

ABSTRACT:
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.

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Transducers '89, The 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Abstracts, Conference Organizers in Medicine, Science and Technology, Lecture No. D3.6, p. 271 (Jun. 25-30, 1989).

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