Microrelay and a method for producing the same

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

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361819, 323264, H01H 5122

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active

053980115

ABSTRACT:
A microrelay including a substrate having a pair of fixed contacts fixed on a surface thereof and a movable section having a pair of movable contacts opposed to the pair of fixed contacts. The movable section includes a frame for fixing the movable section to the substrate; a movable body having the pair of movable contacts and a pair of magnetic bodies; and a coupling section for pivotally supporting the movable body to the frame. The substrate has a pair of magnetic force generating devices for supplying the pair of magnetic bodies with a magnetic force, thereby selectively causing contact between one of the pair of movable contacts and the fixed contact opposed to the one of the pair of movable contacts; and a magnetic force controlling device for applying the magnetic force generated by each of the pair of magnetic force generating devices only to the magnetic body corresponding to each of the magnetic force generating device. A method for producing such a microrelay includes the steps of depositing an insulating film on the surface of the substrate; forming the pair of fixed contacts each formed of a conductive film on the insulating film; and forming a groove at the surface of the substrate between the pair of fixed contacts.

REFERENCES:
patent: 3325722 (1967-06-01), Romberg
patent: 4668928 (1987-05-01), Davis et al.
patent: 4826131 (1989-05-01), Mikkor
patent: 5133543 (1992-10-01), Hitachi et al.
1989 IEEE, pp. 149-151, Sakata, "An electrostatic Microactuator for Electro-Mechanical Relay".

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