Method for verifying an average topography height function of a

Details Method for verifying an average topography height function of a Method for verifying an average topography height function of a

1995-12-28

1999-09-28

Kelley, Christopher S.

Image analysis

Applications

Manufacturing or product inspection

356374, G06K 900

Patent

active

059601078

ABSTRACT:
A method for verifying the accuracy of an average topography height function of a photostepper is provided, which includes the steps of placing a wafer on the photostepper for subjecting at least one layout disposed thereon to the average topography height function of the photostepper, wherein the layout has a known average topography height; operating the average topography height function of the photostepper to obtain a measured average topography height; and comparing the measured topography height to the known average topography height. A method for compensating for an inaccuracy of the average topography height function of the photostepper which includes the same steps for verifying the function, whereby an error results; and adds the step of compensating subsequent measurements of the average topography height function by a correcting factor equal to the magnitude of the error. Another method is also provided for verifying and the accuracy of and for calibrating an inaccuracy of the average topography height function which includes the use of a focus/exposure matrix.

REFERENCES:
patent: 5319570 (1994-06-01), Davidson et al.
patent: 5418363 (1995-05-01), Elings et al.
patent: 5465154 (1995-11-01), Levy
patent: 5691540 (1997-11-01), Halle et al.

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