Positive type, radiation-sensitive organic polymer materials

Details Positive type, radiation-sensitive organic polymer materials Positive type, radiation-sensitive organic polymer materials

1983-11-09

1985-03-12

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 10, 528 25, 528270, 528 14, 528 19, 556436, C08G 7706

Patent

active

045046468

ABSTRACT:
Aliphatic aldehyde polymer containing at least one Si atom in its molecular chain is a positive type resist having a very high sensitivity to radiation such as electron beams, X-rays, ion beams, etc.

REFERENCES:
patent: 2588083 (1952-03-01), Burkhard et al.
patent: 2989559 (1961-06-01), Marsden
patent: 4424392 (1984-01-01), Petty

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