Method of making a titanium dioxide oxygen sensor element by che

Details Method of making a titanium dioxide oxygen sensor element by che Method of making a titanium dioxide oxygen sensor element by che

1984-03-15

1985-03-12

Bueker, Richard

Coating processes

Electrical product produced

Resistor for current control

427101, 4271263, 427125, 4272553, 338 34, 73 27R, B05D 512

Patent

active

045045224

ABSTRACT:
A method is disclosed for making a titanium dioxide element which can be used as an oxygen sensing element. The method includes obtaining a substrate for supporting a titanium dioxide film and placing that substrate in a vacuum chamber. A vacuum is drawn on the vacuum chamber and the chamber is heated to a temperature in a range from 400.degree.-700.degree. C. A low pressure carrier gas containing 1-10% by volume of oxygen along with a coating gas formed from an organometallic compound of titanium is flowed over the substrate. The coating gas is one which is heat decomposable into a titanium dioxide coating on the heated substrate. The coating gas and the carrier gas are at a total pressure from 100-200 Pa. The coating gas and carrier gas are flowed over the substrate until a titanium dioxide film of required thickness is built up. After formation of the required thickness of the titanium dioxide film, the substrate is removed from the vacuum chamber and heated to a temperature in a range from 800.degree.-1100.degree. C. for a period of 1-10 hours to transform the film on the substrate to a rutile phase titanium dioxide.

REFERENCES:
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patent: 4228128 (1980-10-01), Esper et al.
patent: 4234542 (1980-11-01), Romine
patent: 4335369 (1982-06-01), Taniguchi et al.
Sakurai et al., Rev. Elect. Comm. Lab., 11, 1963, p. 178.
Yokozawa et al., Japan J. of Appl. Phys., 7, 1968, p. 96.

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