Mechanical resonance, silicon accelerometer

Details Mechanical resonance, silicon accelerometer Mechanical resonance, silicon accelerometer

1993-04-15

1995-03-14

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73516LM, G01P 1508

Patent

active

053967984

ABSTRACT:
A silicon accelerometer includes several silicon layers. The silicon layers form two silicon beams supported by flexure members. An acceleration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. Sensing electronics detect vibration of the two silicon beams.

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