Thin film semiconductor having a monocrystalline region containi

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

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257 49, 257 50, 257 51, 257 56, 257 62, 257 64, 257 65, 257 63, 257 66, 257347, 257350, 257352, 257369, H01C 2904

Patent

active

059593130

ABSTRACT:
Regions 106 which can be regarded as being monocrystalline are formed locally by irradiating with laser light, and at least the channel-forming region 112 is constructed using these regions. With thin-film transistors which have such a construction it is possible to obtain characteristics which are similar to those which employ monocrystals. Further, by connecting in parallel a plurality of such thin-film transistors it is possible to obtain characteristics which are effectively equivalent to those of a monocrystalline thin-film transistor in which the channel width has been increased.

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