Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1996-06-14
1999-09-28
Porta, David P.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
2503381, G01J 554
Patent
active
059592982
ABSTRACT:
A novel reticulated array comprises islands of ceramic (e.g. BST 40) which are fabricated from novel materials using unique methods of patterning. A shallow etch stop trench (46) is first ion milled around each ceramic island on front side and then filled with an etch stop material (e.g. parylene 48). An optical coat (e.g transparent metal layer 54, transparent organic layer 56 and conductive metallic layer 58) is elevated above the etch stop material by an elevation layer (e.g. polyimide 49). For some applications, it has been experimentally verified that there is no loss, and sometimes a measured increase, in optical efficiency when the optical coating is not planar in topology. Novel fabrication methods also provide for the convenient electrical and mechanical bonding of each of the massive number of ceramic islands to a signal processor substrate (e.g. Si 86) containing a massive array of sensing circuits.
REFERENCES:
patent: 3359192 (1967-12-01), Heinrich et al.
patent: 4080532 (1978-03-01), Hopper
patent: 4139444 (1979-02-01), Singer et al.
patent: 4662984 (1987-05-01), Ohtake et al.
patent: 4740700 (1988-04-01), Shaham et al.
patent: 4745278 (1988-05-01), Hanson
patent: 4792681 (1988-12-01), Hanson
patent: 4926051 (1990-05-01), Turnbull
patent: 4927771 (1990-05-01), Ferrett
patent: 5115442 (1992-05-01), Lee et al.
R. Watton, F. Ainger, S. Porter, D. Pedder and J. Gooding, "Technologies and Performance for Linear and Two Dimensional Pyroelectric Arrays", SPIE vol. 510, Infrared Technology X, 1984, pp. 139-149. No month.
T.D. Flaim, G.A. Barner and T. Brewer, "A Novel Release Layer Syster for IC Processing", Brewer Science, Inc. Rolla, Missouri, presented at KTI IF Conference, Nov., 1989.
C. Hanson, H. Beratan, R. Owen and K. Sweetser, "Low-Cost Uncooled Focal Plane Array Technology", Texas Instruments Incorporated, DSEG, presented at IRIS Specialty Group on Infrared Detectors, Bedford, MA, Jul. 14, 1993.
C. Hanson, "Uncooled Thermal Imaging at Texas Instruments", SPIE 1993, International Symposium on Optics, Imaging and Instrumentation, Infrared Technology XIX, San Diego, Jul. 14, 1993.
H. Kaufman, R. Robinson and W. Hughes, "Characteristics, Capabilities and Applications of Broad-Beam Sources", Commonwealth Scientific Corporation, Alexandria, Virginia, 1987. No month.
R. Watton, "Ferroelectrics for Infrared Detection and Imaging", ISAF 1986, Proceedings of the Sixth IEEE International Symposium on Applications of Ferroelectrics, Jun., 1986.
D.J. Warner, D.J. Pedder, J.S. Moody and J. Burrage, "The Preparation and Performance of Reticulated Targets for the Pyroelectric Vidicon", Ferroelectrics, 33, 1981, pp. 249-253. No Month.
Belcher James F.
Owen Robert A.
Carlson Brian A.
Donaldson Richard L.
Hanig Richard
Kesterson James C.
Porta David P.
LandOfFree
Infrared detector array with an elevated thin film does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Infrared detector array with an elevated thin film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Infrared detector array with an elevated thin film will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-706197