Processes for depositing metal compound coatings

Details Processes for depositing metal compound coatings Processes for depositing metal compound coatings

1984-07-10

1987-05-26

Childs, Sadie L.

Coating processes

Coating by vapor, gas, or smoke

427249, 427255, C23C 1630, C23C 1632

Patent

active

046685383

ABSTRACT:
A metal compound having a metal radical containing one or more metals, and a radical containing hydrogen and one or more of the elements C, N, O and B is thermally decomposed in the presence of a substrate to form a coating of a metal oxide, nitride carbide or boride on the substrate. In one embodiment of the invention, the metal compound is entrained in a supersonic molecular beam which, upon impact with the surface to be coated, thermally decomposes, forming a refractory metal coating and gaseous by-products.

REFERENCES:
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patent: 4268582 (1981-05-01), Hale et al.
patent: 4374162 (1983-02-01), Takagi
Shinoda et al, "CVD Al.sub.2 O.sub.3 Films on III-V Binary Semiconductors", Japanese Journal of Applied Physics, vol. 19, No. 6, pp. L299-L301, Jun. 1980.
Powell et al., "Vapor Deposition", pp. 343-352, 384-386 & 398-402, TS695, P6, May, 1972.
Guy, "Elements of Physical Metallurgy", Addison-Wesley Publishing Co., (1967), pp. 142-146.
Schwarzkopf et al., "Refractory Hard Metals", MacMillan Co., (1953), pp. 172-180, 260-268, 312-315.
"American Society for Metals," Metals Handbook, Ninth Edition, vol. 5, pp. 361-374, 381-421 (10/82).
J. T. A. Roberts, "Structural Materials in Nuclear Power Systems," (1981), pp. 53-60, 119-124.

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