Vacuum-sealed silicon incandescent light

Electric lamp and discharge devices – With gas or vapor – Incandescent filament lamp

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Details

313315, 313495, 313580, 313634, 313636, H01K 102, H01K 128, H01K 150

Patent

active

052851311

ABSTRACT:
A microlamp including a polysilicon filament coated with a protective layer and enclosed by a window in a vacuum-sealed cavity.

REFERENCES:
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patent: 4724356 (1988-02-01), Daehler
patent: 4749443 (1988-06-01), Mitchell et al.
"Performance and Design Considerations of the Thin-Film Tungsten Matrix Display," Paul M. Alt and Peter Pleshko, IEEE Transactions on Electron Devices, vol. Ed-20, No. 11, Nov., 1973.
"A Thin-Film Integrated Incandescent Display," Frederick Hochberg, Hugo K. Seitz and Alan V. Brown, IEEE Transactions On Electron Devices, vol. ED-20, No. 11, Nov. 1973.
"Integrated Transducers Based on Blackbody Radiation from Heated Polysilicon Filaments," H. Guckel and D. W. Burns, Wisconsin Center for Applied Microelectronics, University of Wisconsin, Madison, Wisconsin. Dec. 1985.
"Integrated-Circuit Broadband Infrared Sources," G. Lamb, M. Jhabvala and A. Burgess of Goddard Space Flight Center, NASA Tech Briefs, Mar. 1989.
"Lightly Doped Polysilicon Bridge as an Anemometer," Yu-Chong Tai and Richard S. Muller, Berkeley Integrated Sensor Center, Transducers'87. Dec. 1987.
"Micro-Diaphragm Pressure Sensor," S. Sugiyama, T. Suzuki et al., Toyota Central Research & Development Lab., Inc., Rec. of the IEEE Int. Electron Devices Meeting, 1986, pp. 184-187. Dec. 1986.

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