Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1998-12-09
2000-02-29
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359223, 345108, 353 31, 348771, G02B 2608
Patent
active
060316578
ABSTRACT:
The present invention provides a Schlieren projection system with a large aperture reflective imager. The combination of a beam-addressed CCM design with flat-panel manufacturing techniques configuration produces a large aperture imager that overcomes the problems of limited deflection range, high beam current, electrostatic instability and limited resolution associated with known electrostatically-actuated micromirror targets. The CCM imager includes a thin insulating membrane that decouples the electron beam from the micromirror array. Decoupling also allows the mirror to be designed to optimize reflectivity, exhibit a higher resonant frequency for better video performance, and be fabricated simultaneously with the hinges. The CCM imager is fabricated using flat-panel manufacturing techniques that are ideally suited to producing large aperture devices at low cost.
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Gifford Eric A.
Little Michael J.
Robinson William P.
Burke Margaret
Epps Georgia
MEMSolutions, Inc.
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