Semiconductor device having local connections formed by conducti

Details Semiconductor device having local connections formed by conducti Semiconductor device having local connections formed by conducti

1996-08-15

1998-09-29

Nguyen, Viet Q.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

257382, 257383, 257377, 257401, H01L 2190

Patent

active

058148868

ABSTRACT:
A process of production of a semiconductor device comprising the steps of forming a first interlayer insulating film for covering a transistor formed on a substrate; forming a contact hole which will be connected to the transistor and a contact hole for local connection which will connect locations near each other simultaneously; and filling the contact holes with a conductor to form conductive plugs.

REFERENCES:
patent: 4890141 (1989-12-01), Tang et al.
patent: 5202579 (1993-04-01), Fuji et al.
patent: 5293053 (1994-03-01), Malhi et al.
patent: 5398200 (1995-03-01), Mazure et al.
patent: 5574308 (1996-11-01), Mori et al.
patent: 5600165 (1997-02-01), Tsukamoto et al.
patent: 5627400 (1997-05-01), Koga
patent: 5661325 (1997-08-01), Hayashi et al.

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