Apparatus and method for generating low energy electrons

Details Apparatus and method for generating low energy electrons Apparatus and method for generating low energy electrons

1997-03-07

1999-04-27

Patel, Nimeshkumar D.

Electric lamp and discharge devices

Photosensitive

Photocathode

313539, 313523, 361212, 361213, H01J 4006, H05F 300, H05F 306

Patent

active

058982680

ABSTRACT:
Apparatus (10, 30, 60) and a method for generating low energy electrons (26, 46) for neutralizing charges (16, 36, 66) accumulated on a wafer (14, 34, 64) is provided. The apparatus includes a photocathode (24, 44, 67) located within a predetermined distance from the wafer (14, 34, 64), and a light source (20, 40, 70, 76, 86) operable to emit a light (22, 42, 72, 78, 88) striking the photocathode (24, 44, 67), the photocathode (24, 44, 67) generating a cloud of low energy electrons (26, 46) with a narrow energy distribution near the wafer (14, 34, 64).

REFERENCES:
patent: 5621605 (1997-04-01), Inaba et al.

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