Probe station for low current, low voltage parametric measuremen

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324761, G01R 3102

Patent

active

060313838

ABSTRACT:
A probe station has probe manipulators with probe supports disposed around a cover assembly with an inspection opening. Each probe support has a vertical tube extending through an opening in the cover assembly and a horizontal adjustable member extending radially inwardly and supporting a probe holder. Each such horizontal member may be angularly and longitudinally adjusted with respect to its vertical tube. Pairs of coaxial guarding cables run inside the vertical tubes and make Kelvin connections to the probe holders.

REFERENCES:
patent: 5345170 (1994-09-01), Schwindt et al.
patent: 5457398 (1995-10-01), Schwindt et al.
"Fixturing for Low-Current/Low-Voltage Parametric Testing" by William Knauer, Keithley Instruments, Inc., Systems Division published in Evaluation Engineering--Nov. 1990.

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