Micromechanical component part and method for the manufacture th

Details Micromechanical component part and method for the manufacture th Micromechanical component part and method for the manufacture th

1994-05-13

1997-02-04

Dougherty, Thomas M.

Electrical generator or motor structure

Dynamoelectric

Rotary

1566571, 310309, H02N 100, H01L 21306

Patent

active

056001908

ABSTRACT:
A micromechanical component, for example a motor, wherein micromechanical structures such as a rotor, rotational axle, and stator, are manufactured of the same layer or multiple layer of, for example, CVD tungsten deposited in corresponding trenches. As a result thereof, no alignment problems arise. The static micromechanical structures are connected to the underlying substrate with electrical and/or mechanical connecting means, whereby retaining the movable micromechanical structure to a substrate can be simultaneously achieved. The manufacturing process is compatible with the production of integrated circuits on silicon and requires only three photolevels.

REFERENCES:
patent: 5399415 (1995-03-01), Chen et al.
patent: 5472539 (1995-12-01), Saia et al.
patent: 5493156 (1996-02-01), Okada
Kenichiro Suzuki, Single Crystal Silicon Micro-Actuators, IEEE International Electron Devices Meeting: San Francisco, CA, Dec. 9-12, 1990, New York, pp. 2641-2644.
Chen et al., A Selective CVD Tungsten Process for Micromotors, TRANSDUCERS, 1991, Int. Conf. on Solid-State Sensors and Actuators. San Francisco, IEEE Cat. No. 91CH2817-5, pp. 739 - 742 month unknown.
Mehregany et al., Surface Micromachined Mechanisms and Micromotors, J. Micromech. Microeng., 1991, vol. 1, pp. 73 - 85 month unknown.
Tavrow et al., Operational Characteristics of Microfabricated Electric Motors, Sensors and Actuators, 1992, pp. 33 - 44 month unknown.
Bley et al., Description of Microstructures in Liga-Technology, Microelectronic engineering 13, 1991, pp. 509 - 512 month unknown.

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