Modular, self-diagnostic mass-flow controller and system

Details Modular, self-diagnostic mass-flow controller and system Modular, self-diagnostic mass-flow controller and system

1984-10-29

1987-06-16

Chambers, A. Michael

Fluid handling

With indicator, register, recorder, alarm or inspection means

Position or extent of motion indicator

73204, 340606, G01F 168

Patent

active

046729976

ABSTRACT:
A modular, self-diagnostic mass-flow controller and system includes separable and readily interchangeable housing portions cooperative to provide mass-flow controller component repair and replacement without further system disconnection. The mass-flow controller includes dual mass-flow sensors and associated electronics including a processor operative in response to the dual mass-flow sensor and other signals to both provide mass-flow control of a controlled gas and self-diagnostics to ensure that the controller is operating in its intended manner.

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