Fishing – trapping – and vermin destroying
Patent
1988-02-12
1989-04-11
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 78, 437 90, H01L 2906, H01L 29165
Patent
active
048206539
ABSTRACT:
A method has been developed for providing tub regions with various resistivities in a dielectrically isolated (DI) structure. The starting substrate material is etched to expose the locations designated for a resistivity modification, and epitaxial material of the modified resistivity value is used to fill the exposed tubs. The remainder of the fabrication process follows conventional DI fabrication techniques. The procedure may simply be used to create a DI structure containing both n-type and p-type tube regions. The idea may also be extended, however, to providing separate tubs with, for example, n+ resistivity, n- resistivity, p- resistivity and p+ resistivity, all within the same DI structure.
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patent: 4416050 (1983-11-01), Sarace
patent: 4528047 (1985-07-01), Beyer et al.
patent: 4554059 (1985-11-01), Short et al.
patent: 4579625 (1986-04-01), Tabata et al.
patent: 4593458 (1986-06-01), Adler
patent: 4624047 (1986-11-01), Tani
Conversion of the Conductivity Mode in Silicon by Oxygen Ion Implantation and Its Application in a Novel Dielectric Isolation Technique, J. Y. Chi and R. P. Holmstrom, Appl. Phys. Lett. 40(5), Mar. 1, 1982, pp. 420-422.
Easter William G.
Leffel Daniel D.
American Telephone and Telegraph Company
AT&T - Technologies, Inc.
Chaudhuri Olik
Koba Wendy W.
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