Fishing – trapping – and vermin destroying
Patent
1996-11-27
1998-02-03
Bowers, Jr., Charles L.
Fishing, trapping, and vermin destroying
437 52, 437201, 437919, H01L 2170
Patent
active
057144028
ABSTRACT:
A capacitor structure suitable for the high integration of a semiconductor device is fabricated with a method comprising the steps of: providing a semiconductor substrate; forming a ruthenium-platinum film on the semiconductor substrate; thermally treating the ruthenium-platinum film to grow a ruthenium-platinum oxide on the ruthenium-platinum film; and forming a dielectric film and a conductive layer on the ruthenium-platinum oxide, in sequence.
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Bowers Jr. Charles L.
Hyundai Electronics Industries Co,. Ltd.
Nath Gary M.
Thomas Toniae M.
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