Method for fabricating adhesion-resistant micromachined devices

Details Method for fabricating adhesion-resistant micromachined devices Method for fabricating adhesion-resistant micromachined devices

1997-04-21

2000-08-01

Dixon, Merrick

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156247, 156267, 156310, 156344, 427249, 427258, 427402, 427404, B32B 3100

Patent

active

06096149&

ABSTRACT:
A method for fabricating an adhesion-resistant microelectromechanical device is disclosed wherein amorphous hydrogenated carbon is used as a coating or structural material to prevent adhesive failures during the formation and operation of a microelectromechanical device.

REFERENCES:
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5364497 (1994-11-01), Chau et al.
patent: 5793485 (1998-08-01), Gourley

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