Apparatus for generating large distributed plasmas by means of p

Details Apparatus for generating large distributed plasmas by means of p Apparatus for generating large distributed plasmas by means of p

1995-01-11

1998-02-03

Niebling, John

Coating apparatus

Gas or vapor deposition

With treating means

118723ME, C23C 1600

Patent

active

057140090

ABSTRACT:
An apparatus and method for generating a plasma within a volume containing a mixture of gaseous species. To generate the plasma, at least one large area applicator, which is a part of this invention, is employed. At least one microwave generator introduces microwave power into the applicator by means of suitable waveguides and couplers.

REFERENCES:
patent: 4952273 (1990-08-01), Popov
patent: 4987284 (1991-01-01), Fujimura
patent: 5359177 (1994-10-01), Taki
patent: 5364519 (1994-11-01), Fujimura et al.

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