Diaphragm structure

Details Diaphragm structure Diaphragm structure

1996-04-29

1999-10-12

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 347 68, H01L 4108

Patent

active

059659700

ABSTRACT:
A diaphragm structure includes a ceramic substrate having at least one window portion and a thin diaphragm laminated onto the ceramic substrate so as to cover the window portion, wherein only a part of an interface between the ceramic substrate and the thin diaphragm is joined to form a joint of the diaphragm. A diaphragm structure is free from instability caused by a breakage or deformation of a partition wall between window portions upon punching or laminating even if a diaphragm structure employs a design in which dimensions of a diaphragm portion is maintained and simultaneously a distance between diaphragm portions is made narrow to restrain a surface area excluding a diaphragm portion of a diaphragm structure or a design in which a plurality of diaphragm portion having various configurations and dimensions are disposed.

REFERENCES:
patent: 4558249 (1985-12-01), Lerch et al.
patent: 4766671 (1988-08-01), Utsumi et al.
patent: 4864271 (1989-09-01), Yajima
patent: 4888598 (1989-12-01), Heinzl et al.
patent: 4938742 (1990-07-01), Smits
patent: 5371428 (1994-12-01), Kikuchi et al.
patent: 5381171 (1995-01-01), Hosono et al.

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