Surface acoustic wave device using higher order mode of leakage

Details Surface acoustic wave device using higher order mode of leakage Surface acoustic wave device using higher order mode of leakage

1996-11-22

1999-10-12

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H03H 915

Patent

active

059659696

ABSTRACT:
A surface acoustic wave device includes a quartz substrate and generates surface acoustic waves having a high sonic speed. A surface acoustic wave device includes a surface wave substrate comprising a quartz substrate on which an ZnO thin film functioning as a piezoelectric thin film is disposed. IDTs comprising respective pairs of comb electrodes are disposed in contact with the ZnO thin film. A thickness and arrangement of the piezoelectric thin film relative to the quartz substrate and comb electrodes is such that a novel higher order mode of leakage elastic surface acoustic waves are generated and effectively used enable operation at higher sonic velocity and higher frequency.

REFERENCES:
patent: 4544857 (1985-10-01), Shimizu
patent: 5302877 (1994-04-01), Sato et al.
patent: 5446330 (1995-08-01), Eda et al.
patent: 5719538 (1998-02-01), Kadota
patent: 5760522 (1998-06-01), Kobayashi et al.

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