Scanning probe microscope and processing apparatus

Details Scanning probe microscope and processing apparatus Scanning probe microscope and processing apparatus

1997-11-13

1999-10-12

Lee, John R.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 73105, H01J 3728, G01B 2130

Patent

active

059658819

ABSTRACT:
This scanning probe microscope can accurately obtain information on surfaces of a sample when measuring the sample in a broad range from a slow scanning speed to a fast scanning speed. The scanning probe microscope comprises a cantilever (16) with a probe (15) at its tip, an optical lever mechanism (17,18) for measuring displacement of the cantilever (16), a mechanism for approaching/separating the cantilever against the sample, XY scanning circuit (21), and further comprises a Z axis piezoelectric element (14b) of a tripod for changing the distance between the cantilever and the sample, a control circuit (20) for controlling the distance between the cantilever and the sample to cause a displacement signal s1 obtained from the optical lever mechanism to be identical to a set value s0, and an adder (24) for adding a control signal from the control circuit and a signal based on the deviation between the displacement signal and the set value. The information on the sample surface is obtained from a signal outputted from the adder.

REFERENCES:
patent: 5001409 (1991-03-01), Hosaka et al.
patent: 5260572 (1993-11-01), Marshall
patent: 5329808 (1994-07-01), Elings et al.
patent: 5388452 (1995-02-01), Harp et al.
patent: 5448399 (1995-09-01), Park et al.
patent: 5714831 (1998-02-01), Walker et al.
patent: 5741614 (1998-04-01), McCoy et al.
patent: 5801381 (1998-09-01), Flecha et al.
patent: 5805448 (1998-09-01), Lindsay et al.

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