Integrated CMOS spectrometers

Details Integrated CMOS spectrometers Integrated CMOS spectrometers

1998-05-20

1999-10-12

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250226, 257461, H01J 4014

Patent

active

059658738

ABSTRACT:
A spectrometer, comprises: a semiconductor having a silicon substrate, the substrate having integrally formed thereon a plurality of layers forming photo diodes, each of the photo diodes having an independent spectral response to an input spectra within a spectral range of the semiconductor and each of the photo diodes formed only from at least one of the plurality of layers of the semiconductor above the substrate; and, a signal processing circuit for modifying signals from the photo diodes with respective weights, the weighted signals being representative of a specific spectral response. The photo diodes have different junction depths and different polycrystalline silicon and oxide coverings. The signal processing circuit applies the respective weights and sums the weighted signals. In a corresponding method, a spectrometer is manufactured by manipulating only the standard masks, materials and fabrication steps of standard semiconductor processing, and integrating the spectrometer with a signal processing circuit.

REFERENCES:
patent: 4079405 (1978-03-01), Ohuchi et al.
patent: 4191452 (1980-03-01), Grinberg et al.
patent: 4820915 (1989-04-01), Hamakawa et al.
patent: 5726440 (1998-03-01), Kalkhoran et al.

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