Dimension checking method

Details Dimension checking method Dimension checking method

1988-12-29

1991-04-30

Razavi, Michael

Image analysis

Histogram processing

For setting a threshold

382 1, 358107, G06K 900

Patent

active

050125230

ABSTRACT:
A method for checking dimensions of patterns comprising: a first process of selecting patterns of a predetermined kind from a number of patterns including various kinds of patterns; and a second process of judging whether or not each of the selected patterns is formed with a predetermined dimension. The first process comprises the following steps: (i) recognizing the shape of each pattern; and (ii) selecting patterns to be checked by excluding patterns having more than a first degree of difference in shape. The second process comprises the following steps: (iii) calculating the position of the center of gravity of the selected pattern; (iv) representing an upper limit pattern image and a lower limit pattern image and superimposing the images on the image of the selected pattern with the centers of gravity of the upper and lower limit patterns coinciding with that of the selected pattern; and (v) judging an acceptability of the pattern according to whether or not the selected pattern image is represented between the upper limit pattern image and the lower limit pattern image.

REFERENCES:
patent: 3854822 (1974-12-01), Altman et al.
patent: 4017721 (1977-04-01), Michaud
patent: 4163212 (1979-07-01), Buerger et al.
patent: 4233625 (1980-11-01), Altman
patent: 4500202 (1985-02-01), Smyth
patent: 4635289 (1987-01-01), Doyle et al.
patent: 4644583 (1987-02-01), Watanabe et al.
patent: 4695982 (1987-09-01), Preysman

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