Transport container for wafer-shaped objects

Details Transport container for wafer-shaped objects Transport container for wafer-shaped objects

1996-06-13

1997-09-09

Fidei, David T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206710, 206454, 414940, 118500, B65D 8530

Patent

active

056646798

ABSTRACT:
A transport container for wafer-shaped objects to keep particles away from and remove them from the interior of the transport container when opening the latter, in particular also those particles located in the door gaps, without restricting handling. Cleaning in the form of a self-cleaning process should also be effective when a plurality of transport containers are stacked one on top of the other and the latter should be optionally accessible. At least parts of the rear wall region of a closable container enclosure are constructed as a plenum chamber which has a closable air inlet and a closable air outlet in the base region and cover region, and a connection is formed from the latter to the interior of the container via a filter. The air inlet is constructed so as to complement a connection of a gas reservoir and an air outlet of an additional transport container for coupling. The arrangement is applicable in the manufacture of integrated circuits.

REFERENCES:
patent: 4609103 (1986-09-01), Bimer et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4804086 (1989-02-01), Grohrock
patent: 5169272 (1992-12-01), Bonora et al.
patent: 5255783 (1993-10-01), Goodman et al.
patent: 5346518 (1994-09-01), Baseman et al.

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