Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1978-10-24
1980-09-23
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148188, 148189, 148 15, H01L 2122
Patent
active
042240883
ABSTRACT:
A method for manufacturing steps of depositing phosphorus onto separate portions of a silicon substrate, covering only one portion with a polycrystalline silicon layer and heating the deposited phosphorus on the separate portions at the same time to diffuse thereby forming two diffusion layers of different depths.
REFERENCES:
patent: 3566218 (1971-02-01), Widlar
patent: 3879230 (1975-04-01), Nakamura et al.
patent: 4069067 (1978-01-01), Ichinohe
patent: 4144106 (1979-03-01), Tokeuchi
patent: 4146413 (1979-03-01), Yonezawa et al.
Inoue Hiroshi
Komatsu Shigeru
Ozaki G.
Tokyo Shibaura Denki Kabushiki Kaisha
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