Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1989-03-01

1990-01-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, G01L 708, G01L 906

Patent

active

048950262

ABSTRACT:
A semiconductor pressure sensor comprising a first and a second identical pressure sensing diaphragm each having first and second pressure receiving surfaces and supported to align in a common plane in the same orientation. Two pressure sensing diaphragms have connected thereto similar bridge circuits made of piezoelectric elements for generating electrical signals indicative of the fluid pressure acting on the pressure sensing diaphragms. A first fluid passage connectable to a first pressure source is in communication with the first pressure receiving surface of the first diaphragm and the second pressure receiving surface of the second diaphragm, and a second fluid passage is in communication with a second pressure receiving surface of the first diaphragm and the first pressure receiving surface of the second diaphragm. The two electrical signal are supplied to a differential amplifier where two signals are substracted and an output electrical signal proportional to the magnitude of the result of the substraction between the first and the second electrical signals.

REFERENCES:
patent: 4222277 (1980-09-01), Kurtz
patent: 4790192 (1988-12-01), Knecht et al.

Affiliated with

Also associated with

Rating

Semiconductor pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-639908