Solid state imaging device and method for producing the same

Details Solid state imaging device and method for producing the same Solid state imaging device and method for producing the same

1993-07-28

1995-05-16

Jackson, Jerome

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Charge transfer device

257245, 257247, 257229, 257436, H01L 2978, H01L 2714, H01L 3100

Patent

active

054163447

ABSTRACT:
A solid state imaging device which reduces the occurrence of crosstalk between a plurality of picture elements arranged in a linear or matrix form. The solid state imaging device includes a plurality of photosensitive cells formed on a first principal surface of a semiconductor substrate, a transfer electrode formed in a gap area among the cells on the first principal surface to read out charges produced in the cells, a drive metal wiring formed on the transfer electrode within the gap area, a first insulating film covering the cells with a predetermined thickness, and a plurality of metal reflecting films formed on the first insulating film in such a manner that the whole surface of each of the metal reflecting films forms a reflecting surface substantially parallel to a surface of each of the cells on the side of the first principal surface whereby light passed through the photosensitive cells from a side opposite to the first principal surface is reflected back to each of the photosensitive cells.

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