Step type mask aligner

Details Step type mask aligner Step type mask aligner

1983-11-28

1985-07-23

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, G03B 2742

Patent

active

045305870

ABSTRACT:
A mask aligner for stepping and exposing a wafer in accordance with a shot arrangement, including an input device to which wafer dimension, chip dimension and a chip pattern for one shot are inputted, a selector for selecting a shot arrangement mode from plural shot arrangement modes based on the above input signals, a controller for effecting the shots in accordance with the selected modes to minimize the time required for exposing the one entire wafer or to maximize the number of chips exposed per unit.

REFERENCES:
patent: 3716296 (1973-02-01), Springer et al.
patent: 3722996 (1973-03-01), Fox
patent: 4155642 (1979-05-01), Lacombat
patent: 4427292 (1984-01-01), Buchanan

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