Method of making symmetrical and asymmetrical MESFETS

Details Method of making symmetrical and asymmetrical MESFETS Method of making symmetrical and asymmetrical MESFETS

1993-03-15

1996-04-30

Fourson, George

Fishing, trapping, and vermin destroying

437912, H01L 21265

Patent

active

055124992

ABSTRACT:
A method of fabricating a MESFET is comprised of providing a semiconductor material having a channel region formed therein, forming a gate on the semiconductor material over the channel region, forming a spacer adjacent a first portion of the gate disposed on the semiconductor material, and forming a hard mask disposed on a second portion of the gate and on a portion of the semiconductor material.

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