Bore-sighted step-and-repeat projection alignment and exposure s

Details Bore-sighted step-and-repeat projection alignment and exposure s Bore-sighted step-and-repeat projection alignment and exposure s

1985-03-11

1986-03-25

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 45, 355 53, 356401, G03B 2752, G03B 2770, G03B 2742

Patent

active

045779589

ABSTRACT:
A projection lens and a source of exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including a source of nonexposure light and the projection lens, is provided for imaging a second adjustable reference mark onto the first reference mark or the semiconductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light.

REFERENCES:
patent: 3192844 (1965-07-01), Szasz et al.
patent: 3461566 (1969-08-01), Gerstner
patent: 3476476 (1969-11-01), Chitayat
patent: 3610750 (1971-10-01), Lewis et al.
patent: 3685117 (1972-08-01), Wing et al.
patent: 3704946 (1972-12-01), Brault et al.
patent: 3716296 (1973-02-01), Springer et al.
patent: 3853398 (1974-12-01), Kano
patent: 3876301 (1975-04-01), Kosugi
patent: 3917399 (1975-11-01), Buzawa et al.
patent: 3940211 (1976-02-01), Johannsmeier
patent: 3984186 (1976-10-01), Momose et al.
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4040736 (1977-08-01), Johannsmeier
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4110762 (1978-08-01), Tigreat
patent: 4128331 (1978-12-01), Nakamura
patent: 4311390 (1982-01-01), Phillips
patent: 4362389 (1982-12-01), Koizumi et al.
patent: 4367046 (1983-01-01), Lacombat
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4422755 (1983-12-01), Phillips
patent: 4437758 (1984-03-01), Suzuki
patent: 4452526 (1984-06-01), Johannsmeier et al.
patent: 4473293 (1984-09-01), Phillips

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