Device for process-type deposition of polycrystalline silicon on

Coating apparatus – Control means responsive to a randomly occurring sensed... – Condition of coated material

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118667, 118694, 118405, B05C 3132

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active

045775885

ABSTRACT:
A crucible containing molten silicon, has a strip of carbon film vertically transported through the melt, an optical system imaging a small area of the silicon surface onto a photodetector, said image area being that of the silicon liquid-solid interface, and a servo system connected to said photodetector and to an electrical drive for feeding silicon into said melt. The invention is applicable to the manufacture of solar cells.

REFERENCES:
patent: 3730962 (1973-05-01), Norwalk
patent: 3740563 (1973-06-01), Reichard
patent: 4246868 (1981-01-01), Brown et al.
patent: 4383130 (1983-05-01), Uroshevich

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