Wave transmission lines and networks – Miscellaneous – Multipactor applications
Patent
1989-02-22
1990-06-12
Gensler, Paul
Wave transmission lines and networks
Miscellaneous
Multipactor applications
31323131, 315 39, 31511141, H05H 130
Patent
active
049336509
ABSTRACT:
A microwave plasma production apparatus of the present invention comprises: a circular coaxial wave guide having a cylindrical outer conductor to inject a microwave power from one end and an inner conductor; a metal end plate in which at the other end of the circular coaxial wave guide, the cylindrical outer conductor is set to be longer than the inner conductor, and which is arranged in the edge portion of the cylindrical outer conductor and has a window of an inner diameter which is almost equal to an inner diameter of a cylinder provided for the inner conductor; a gap portion formed between the edge of the inner conductor and the metal end plate; and a discharge tube arranged from the inside of the cylinder of the inner conductor through the window to form a plasma of a material to be transformed to a plasma by the microwave electric field generated in the gap portion.
REFERENCES:
patent: 4438368 (1984-03-01), Abe et al.
Arams, Microwave Applications of Gas Discharges, Electronics, Nov. 1954, pp. 168-172.
Moisan et al., A Small Microwave Plasma Source, etc., IEEE Trans. on Plasma Science, vol. PS-3, No. 2, Jun. 1975, pp. 55-59.
Gensler Paul
Hitachi , Ltd.
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