Foreign particle detecting method and apparatus

Details Foreign particle detecting method and apparatus Foreign particle detecting method and apparatus

1983-11-03

1987-06-02

Kittle, John E.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250572, G01N 2132

Patent

active

046698752

ABSTRACT:
The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate surface from a direction approximately 90.degree. with respect to the laser light irradiating direction; and the laser light reflected from a foreign particle on the substrate surface is detected by a polarized light analyzer and a photoelectric conversion device from a direction set approximately equal to said scanning direction and inclined with respect to the direction perpendicular to the substrate surface.

REFERENCES:
patent: 2947212 (1960-08-01), Woods
patent: 3667846 (1972-06-01), Nater et al.
patent: 3748047 (1973-07-01), Millgood et al.
patent: 4342515 (1982-08-01), Akiba et al.
patent: 4468120 (1984-08-01), Tanimoto et al.

Affiliated with

Also associated with

Rating

Foreign particle detecting method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Foreign particle detecting method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Foreign particle detecting method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-609817