Recorders – Printing – dotting – or punching marker – Ink transfer support or moving means
Patent
1985-07-23
1988-02-23
Goldberg, E. A.
Recorders
Printing, dotting, or punching marker
Ink transfer support or moving means
369 44, 369116, G01D 942, G11B 700
Patent
active
047273810
ABSTRACT:
An energy (i.e. laser) beam directed to a photoresist layer is scanned in a first direction through lines progressively displaced in a second coordinate direction. In this way, stripe areas of a wafer are exposed sequentially in a first direction with a thickness dependent upon the size of the laser spot focussed on the beam. The beam scanning rate is adjustable to obtain a time coincidence between the occurrence of markers in a computer and the scanning of a particular position in each line. The beam is modulated during the scan to inscribe a pattern on the layer. The beam is focussed on, and reflected from, the photoresist layer. The reflection is used to maintain the focussing of the beam on the layer by adjusting individual elements in an active mirror in accordance with the reflected beam characteristics. The beam may be split into a plurality of beams displaced from one another in the first direction by providing associated pairs of spherical facets in a lens system and directing portions of the beam between the facets in each pair. Such beams are synchronously scanned to increase the scanning frequency. A second beam with different characteristics than the first beam may be scanned asynchronously (e.g. a reduced speed) relative to the first beam and may be focussed on the photoresist layer in a manner similar to that described above. Light reflected in the second beam from the layer is used to adjust the characteristics of the individual elements in the active mirror so as to maintain the beam focussed on the photoresist layer.
REFERENCES:
patent: 4001840 (1977-01-01), Becker et al.
patent: 4293202 (1981-10-01), Ohnishi et al.
patent: 4486791 (1984-12-01), Wada et al.
Bille Josef
Hunklinger Siegfried
Goldberg E. A.
Reinhart Mark
Roston Ellsworth R.
Schwartz Charles H.
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