Method for manufacturing a semiconductor device

Details Method for manufacturing a semiconductor device Method for manufacturing a semiconductor device

1994-10-25

1997-07-01

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437230, 437 41, 437233, 437159, 437959, 437967, 148DIG16, H01L 21228

Patent

active

056438265

ABSTRACT:
A process for fabricating a highly stable and reliable semiconductor, comprising: coating the surface of an amorphous silicon film with a solution containing a catalyst element capable of accelerating the crystallization of the amorphous silicon film, and heat treating the amorphous silicon film thereafter to crystallize the film.

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