Process of manufacturing a semiconductor device

Fishing – trapping – and vermin destroying

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437 26, 437 27, 437149, 437154, H01L 21265

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active

056438087

ABSTRACT:
A method of manufacturing wherein an NPN bipolar transistor, an N-type impurity region is formed in an N-type epitaxial region or an N-type well region between an N.sup.+ -buried layer region and a P-type intrinsic base region. The N-type impurity region is formed only just below the P-type intrinsic base region. The impurity concentration of the N-type impurity region is either uniform or is higher at a central portion of the region located just below an emitter diffused region than the impurity concentration at the surrounding the central portion.

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patent: 5010026 (1991-04-01), Gomi
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patent: 5183768 (1993-02-01), Kameyama et al.
patent: 5208171 (1993-05-01), Ohmi
patent: 5455189 (1995-10-01), Grubisich

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