Magnetic lens apparatus for a low-voltage high-resolution electr

Details Magnetic lens apparatus for a low-voltage high-resolution electr Magnetic lens apparatus for a low-voltage high-resolution electr

1995-06-07

1996-10-08

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, H01J 3714

Patent

active

055634150

ABSTRACT:
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.

REFERENCES:
patent: 3624390 (1971-11-01), Watanabe
patent: 3870891 (1975-03-01), Mulvey
patent: 4209702 (1980-06-01), Shirai et al.
patent: 4315152 (1982-02-01), Smith
patent: 4419581 (1983-12-01), Nakagawa
patent: 5008549 (1991-04-01), Crewe
patent: 5023457 (1991-06-01), Yonezawa
patent: 5079428 (1992-01-01), Da Lin et al.
patent: 5149967 (1992-09-01), Otaka
patent: 5241176 (1993-08-01), Yonezawa
"New Equipment and Commercial Information," Proceedings RMS , 30(2):177, Jun. 1995.
Crewe, "Is There a Limit to the Resolving Power of the SEM?" Proc. Xlth Int. Cong. on Electron Microscopy, Kyoto, 2105-2108, 1986.
Crewe, "Limits of Electron Probe Formation, " Journal of Microscopy, 178(Pt 2):93-100, May 1995.
Crewe and Parker, "Correction of Third-Order Aberrations in the Scanning Electron Microscopy," Optik 46(2):183-194, Apr. 1976.
Hitachi, "S-4200, Hitachi Scanning Electron Microscope, " 3-24. No dated.
Hitachi, "S-4500, Hitachi Scanning Electron Microscope," 1-16. No dated.
Jeol, "JSM-6320F; Semi-in-lens FE SEM. " No dated.
Kanaya and Ono, "Interaction of Electron Beam with the Target in Scanning Electron Microscope, " Electron Beam Interactions With Solids, 69-98. No dated.
Mulvey, "Unconventional Lens Design," Topics in Current Physics, 389-391, 1982.
Nagatani and Saito, "Instrumentation for Ultra High Resolution Scanning Electron Microscopy," Proc. XIth Int. Cong. on Electron Microscopy, Kyoto, 2101-2104, 1986.
Takasahima, "New Electron Optical Technologies in Low Voltage Scanning Electron Microscopy," Joel News, 31E(1):33-35, 1994.
Zeiss, "New-Technology Scanning Electron Microscope, DSM 982 Gemini," 2-16. No Dated.

Affiliated with

Also associated with

Rating

Magnetic lens apparatus for a low-voltage high-resolution electr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetic lens apparatus for a low-voltage high-resolution electr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic lens apparatus for a low-voltage high-resolution electr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-59400