Linear motor mechanism for exposure apparatus, and device manufa

Electrical generator or motor structure – Dynamoelectric – Linear

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355 53, H02K 4100

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active

061077038

ABSTRACT:
A linear motor mechanism includes a stator element and a movable element being movable relative to the stator element in a predetermined direction through an electromagnetic drive force, wherein the stator element includes a yoke and coils disposed along a predetermined direction while the movable element includes a magnet with plural magnetic poles but with no yoke. Plural stator elements are disposed opposed to each other with a magnet of the movable element disposed therebetween.

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K. Yamazaki, et al., "Development of a New Type Surface Actuator", Proceedings of the International Conference on Industrial Electronics, Control and Instrumentation, IEEE, Conf. 20, Sep. 5, 1994, pp. 509-513.

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