Plasma treatment apparatus

Details Plasma treatment apparatus Plasma treatment apparatus

1991-03-07

1994-02-01

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912154, 21912151, 20429836, 31511181, B23K 900

Patent

active

052834140

ABSTRACT:
The plasma treatment apparatus includes a vacuum-tight first container for receiving the workpieces to be treated, and a pressure-tight second container enclosing the first container. The intermediate space between the two containers can be evacuated by a suction device. If a high-temperature process is performed within the inner container, the intermediate space is evacuated, whereby the inner container is relieved of pressure while the outer container, taking up the pressure, is maintained at a low temperature. With low operating temperatures, a gas is kept in convective flow within the intermediate space so that heat is transmitted from the inner container to the outer container. In this case, pressure is taken up by the inner container.

REFERENCES:
patent: 4430547 (1984-02-01), Yoneda et al.
patent: 4624214 (1986-11-01), Suzuki et al.
patent: 4816638 (1989-03-01), Ukai et al.
patent: 4820907 (1989-04-01), Terauchi et al.
patent: 5047115 (1991-09-01), Charlet et al.
patent: 5082542 (1992-01-01), Moslehi et al.

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