Method for making a semiconductor device having an isolated laye

Fishing – trapping – and vermin destroying

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437 69, 437 72, 437 73, 437947, 148DIG117, H01L 2176

Patent

active

053526260

ABSTRACT:
Steps or grooves are formed in a surface of a semiconductor substrate of a semiconductor device having a plurality of semiconductor elements, and an isolation Layer is formed on regions that include the steps or side walls of the grooves.

REFERENCES:
patent: 4533429 (1985-08-01), Josquin
patent: 4689871 (1987-09-01), Malhi
patent: 4926231 (1990-05-01), Hwank et al.
patent: 4947227 (1990-08-01), Teng
patent: 4975759 (1990-12-01), Sidner et al.
patent: 5013676 (1991-05-01), Horigome
patent: 5250461 (1993-10-01), Sparks

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