Method and apparatus for measuring the resistance of conductive

Details Method and apparatus for measuring the resistance of conductive Method and apparatus for measuring the resistance of conductive

1992-05-08

1994-03-01

Wieder, Kenneth A.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324158R, 324538, 324703, 324713, G01R 2714

Patent

active

052911420

ABSTRACT:
A testing method and apparatus for conductive materials using electric current which makes it possible to rapidly evaluate the electromigration resistance of conductive materials. The apparatus includes a substrate support for supporting a substrate on which an interconnector pattern is formed, a cooling vessel for cooling the substrate, a first current supply for applying a first current to the interconnector, a resistance measurer for measuring the resistance of the interconnector pattern while the first electric current is being applied to the interconnector pattern, a second current supply for applying a second electric current larger than the first electric current to the interconnector pattern, and a controller which controls the repetition of the measurement of resistance of the interconnector pattern and the application of the second current to the interconnector pattern.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4483629 (1984-11-01), Schwarz et al.
patent: 4567432 (1986-01-01), Buol et al.
patent: 4739258 (1988-04-01), Schwarz
"Wafer-Level J-Ramp and J-Constant Electromigration Testing . . . ", by Katto, et al., International Reliability Physics Symposium, pp. 298-305, 1991 (no month).

Affiliated with

Also associated with

Rating

Method and apparatus for measuring the resistance of conductive does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring the resistance of conductive , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring the resistance of conductive will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-580857