Planar piezoelectric deflector with arrays of alternate piezoele

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310358, H01L 4108

Patent

active

044917619

ABSTRACT:
Low cost, easily reproducible piezoelectric deflector (8) operable with low voltages is achieved by providing an interdigital electrode configuration (12, 13) on a surface of piezoelectric material (10) having alternate sites (15, 16) with different piezoelectric response. A preferred embodiment polarizes the sites oppositely in a piezoelectric ceramic substrate (10). Alternate sites in piezoelectric crystals may be removed or have their piezoelectricity substantially reduced. Differential devices (8a, 8b) employ electrodes on both surfaces of the substrate, with a site at one surface being poled oppositely to an adjacent site at the other surface (FIG. 3) or with adjacent sites at both surfaces poled alike, and signal voltages applied oppositely (FIG. 4).

REFERENCES:
patent: Re23813 (1954-04-01), Adler
patent: 2540187 (1951-02-01), Cherry, Jr.
patent: 2836737 (1958-05-01), Crownover
patent: 3584245 (1971-06-01), Helfen
patent: 3676724 (1972-07-01), Berlincourt et al.
patent: 3760203 (1973-09-01), Guntersdorfer
patent: 3943387 (1976-03-01), Veith
patent: 3958161 (1976-05-01), Dixon
Gulton "Piezoceramic Thin Sheet", Product Description 1CN-7812, 1978.

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