Process for forming crystalline semiconductor film

Details Process for forming crystalline semiconductor film Process for forming crystalline semiconductor film

1991-11-13

1994-03-01

Fourson, George

Fishing, trapping, and vermin destroying

437233, 437108, 156603, H01L 2120

Patent

active

052907120

ABSTRACT:
A process for forming a crystalline semiconductor film by crystallization through solid phase growth of an amorphous semiconductor film on a base material comprises implanting ions of an element constituting the amorphous semiconductor film into the amorphous semiconductor film except a fine region therein, then heat-treating the amorphous semiconductor film at a temperature not higher than the melting point of the amorphous semiconductor film, thereby generating a crystal nucleus in the fine region, and making a crystal grow at the crystal nucleus as growth point.

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