Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1991-09-09

1994-03-01

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

296211, 73721, 338 4, G01L 708, G01L 906

Patent

active

052897214

ABSTRACT:
A semiconductor pressure sensor comprises a silicon substrate having a surface orientation of substantially (110), a diaphragm formed from the substrate, strain gauges disposed on the diaphragm, and a base joined with the substrate. The diaphragm has an octagonal shape whose sides are orthogonal to axis<100>, <110>, and<111>, respectively. This sensor causes substantially no output error and no fluctuation between output characteristics of the strain gauges irrespective of a change in temperature.

REFERENCES:
patent: 4691575 (1987-09-01), Sonderegger et al.

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